The new electron beam generator is started in manufacture

The new electron beam generator of the image of manufacture of company Vistec Electron Beam GmbH, Germany is started in manufacture. The generator allows to form the minimum size of topological drawing on a photomask, equal 0,1 microns. At the expense of use of means of temperature indemnification, indemnification of nonlinearity of movement of a coordinate table and stabilization of an electronic beam, our center had a possibility can make photomasks with high performance in parameters.