Supplementary services

During operation by production of integrated circuits the photomasks can get some inherited errors, for instance, damage of masking cover, loss of pellicle film integrity, impurity etc., which make photomasks not usable for further operation.

For this purpose the Center offers some supplementary services concerning photomasks given by the Customer what allow avoiding additional expenditures for a fabrication of a new photomask package as well as minimizing temporary losses in production of integrated circuits.

Supplementary services list:

• Automated check up of compliance of photomask topological pattern with design data and search for masking layer defects;
• Repair of photomask (clear or opaque defects);
• Measuring of critical dimensions of photomask topological pattern;
• Photomask cleaning and pellicle mounting;
• Certification of coordinate system of image generators.

If you have got any questions concerning information above  — contact us, and our specialists will help you to find a necessary solution.